Abstract. TerraSAR-X satellite SAR (Synthetic Aperture Radar) scenes have been analysed using Persistent Scatter Interferometry (PSI) approach to monitor a tunnelling process in Düsseldorf, Germany. The aim of this work is to detect the deformation of ground surface and structures above the tunnelling line during the tunnel excavation. In this study, the PSI approach integrated in the open source software package Stanford Method for Persistent Scatterers (StaMPS) was employed since it has shown significant advantages in obtaining Persistent Scatterers (PS). In order to protect the historic buildings in this region from subsidence-induced damages, a Tunnel Boring Machine (TBM) was used to restrain serious displacements during the tunnelling excavation, as well as compensation injections. Both surface uplifting and subsidence were observed during this tunnelling process, by a levelling survey and a validated PSI observation. It is concluded that sub-centimetre accuracy observations are achievable for process-related monitoring in urban areas, using the open source software package.